JPH01147258U - - Google Patents
Info
- Publication number
- JPH01147258U JPH01147258U JP4099588U JP4099588U JPH01147258U JP H01147258 U JPH01147258 U JP H01147258U JP 4099588 U JP4099588 U JP 4099588U JP 4099588 U JP4099588 U JP 4099588U JP H01147258 U JPH01147258 U JP H01147258U
- Authority
- JP
- Japan
- Prior art keywords
- gas plasma
- sample
- plasma
- reaction product
- etched
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007795 chemical reaction product Substances 0.000 claims description 2
- 230000008021 deposition Effects 0.000 claims description 2
- 238000000151 deposition Methods 0.000 claims 1
- 238000010849 ion bombardment Methods 0.000 claims 1
- 238000001020 plasma etching Methods 0.000 claims 1
Landscapes
- ing And Chemical Polishing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4099588U JPH01147258U (en]) | 1988-03-30 | 1988-03-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4099588U JPH01147258U (en]) | 1988-03-30 | 1988-03-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01147258U true JPH01147258U (en]) | 1989-10-11 |
Family
ID=31267447
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4099588U Pending JPH01147258U (en]) | 1988-03-30 | 1988-03-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01147258U (en]) |
-
1988
- 1988-03-30 JP JP4099588U patent/JPH01147258U/ja active Pending